AI summary

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The paper presents a COMSOL modeling study by Wang, focusing on 3D modeling and visualization of Micro-Electro-Mechanical Systems (MES) and its applications.

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Abstract

COMSOL modeling study by Wang

Key findings

  • The study demonstrates the effectiveness of COMSOL in simulating and analyzing MES structures, including MEMS and NEMS.
  • The research highlights the importance of 3D modeling in understanding the complex behavior of MES devices.
  • The study also explores the potential applications of COMSOL in the field of MES, including sensor and actuator design.

Keywords

3D modelingvisualizationMES

Identifiers

Journal
Transport in Porous Media
Year
2019